Wafer-scale analysis of GaN substrate wafer by imaging cathodoluminescence

Wafer-scale bioactive substrate patterning by chemical lift-off lithography

The creation of bioactive substrates requires an appropriate interface molecular environment control and adequate biological species recognition with minimum nonspecific attachment. Herein, a straightforward approach utilizing chemical lift-off lithography to create a diluted self-assembled monolayer matrix for anchoring diverse biological probes is introduced. The strategy encompasses convenie...

Wafer-Scale VLSI Testing

1 Introduction In the manufacturing of VLSI integrated circuits (ICs), it would be desirable that the ICs undergo an accurate test directly on the wafer, before they are cut and packaged. This would save the cost of bounding and packaging the faulty ICs, which may be a relatively large fraction. However, accurate testing on the wafer can hardly be supported by the consolidated technology of tes...

Fabrication of WS2/GaN p-n Junction by Wafer-Scale WS2 Thin Film Transfer

High quality wafer-scale free-standing WS2 grown by van der Waals rheotaxy (vdWR) using Ni as a texture promoting layer is reported. The microstructure of vdWR grown WS2 was significantly modified from mixture of crystallites with their c-axes both parallel to (type I) and perpendicular to (type II) the substrate to large type II crystallites. Wafer-scale transfer of vdWR grown WS2 onto differe...

Wafer Scale Packaging of MEMS by Using Plasma-Activated Wafer Bonding

Wafer Signature Analysis

Continuous scaling of transistor geometries increases leakage current exponentially. This makes differentiating faulty and fault-free chips extremely difficult. The concept of wafer signature is proposed. A wafer signature is obtained by sorting all IDDQ readings on a wafer for a vector. A break or jump in the wafer signature is considered to indicate defective chips. The use of wafer signature...